ポスター発表
- 第2日 5月12日（火） P会場（1008/09）
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2P-05 PDF
サイズの異なる真空エレクトロスプレー液滴イオンビームによるスパッタ体積
A vacuum electrospray droplet ion (V-EDI) beam generated by electrospray of aqueous solutions under vacuum is one of candidates as new primary ion beam for secondary ion mass spectrometry. In this study, several organic thin films were irradiated by the V-EDI beams, and their surfaces were analyzed by atomic force microscopy (AFM). Sputtered volumes by the V-EDI beams will be evaluated from the AFM images.