演題概要

3C-O2-1509

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イオン軌道シミュレーションソフトTRIOを用いたTOF-SIMSの質量分解能向上

(¹アルバック・ファイ・ ²阪大院理/FRC)
^o城下幸輝¹・ 十河真生¹・ 坂井大輔¹・ 豊田岐聡²

To evaluate the potential performance of mass resolution for the time-of-flight secondary ion mass spectrometry analyzer (TOF-SIMS) (TRIFT analyzer), we simulated the optical trajectory and the mass resolution using the ion trajectory simulation program ‘TRIO’. Under the condition of flight path of 2 meters and pulsed beam duration of 0.5 nano seconds, the calculated mass resolution reaches 17,000 at m/z 28, 41% higher than the current specification of mass resolution. Then, we designed the enhanced TRIFT analyzer by reproducing the simulation configuration as much as possible. The mass resolution of over 16,000 at ²⁸Si⁺ was achieved as it was almost expected.