シンポジウムセッション
第2日 6月11日（火） 10:15～10:30 A会場（中ホール300）
- 2A-S-1015
ダイナミックSIMSのクライオ化
(北大)
o坂本直哉
Secondary ion mass spectrometry (SIMS) is a useful tool for characterizing solid surfaces. Dynamic SIMS is a method of continuously irradiating a sample surface with a high current of primary ions that exceeds the static SIMS limit (1012 ions/cm2). Continuous mass separation of secondary ions using magnetic sector enables analysis with high sensitivity and high duty ratio. Furthermore, imaging with stigmatic ion optics does not require a reduction in current to obtain fine images because spatial resolution is independent of probe size, and highly sensitive isotope images have been obtained with submicron spatial resolution [1].
Cryogenic sample stages were installed in dynamic SIMS instruments early on [e.g. 2]. A system for sample pretreatment within the SIMS instrument has also been developed [3]. However, there are few systems that transport samples frozen in an ultrahigh vacuum to the inside of the device. In this study, we report on the development of a system for transporting pretreated frozen samples to the cold stage of a dynamic SIMS system.