Abstract

Oral Sessions

Day 2, May 16（Thu.）　10:30-10:50　Room C (101)

2C-O1-1030　　PDF

Generation of a Cluster Ion Beam Containing Active Protons from a Sharpened Rod Wetted with an Ionic Liquid: On the Basis of Liquid Metal Ion Sources for Focused Ion Beam (FIB)

(AIST)
^oYukio Fujiwara, Naoaki Saito

Emission of cluster ions from a sharped rod wetted with liquid, which is an important phenomenon in liquid metal ion sources, was investigated using a protic ionic liquid. A stable cluster ion beam was generated from a tip of a sharpened rod wetted with propylammonium nitrate ([C₃H₇NH₃][NO₃]). The cluster ion beam contained massive cluster ions exceeding m/z 5000. In addition, the cluster ion beam was tested as a primary ion beam in secondary ion mass spectrometry (SIMS). The cluster ion beam proved to be useful for enhancing molecular ionization of organic materials.