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Day 3, June 12（Wed.） 15:09-15:27 Room C (Conference Room 201)
- 3C-O2-1509
Enhancing Mass Resolution of TOF-SIMS Analyzer Using the Ion Trajectory Simulation Program TRIO
(1ULVAC-PHI, 2Osaka Univ.)
oKoki Joshita1, Mauo Sogo1, Daisuke Sakai1, Michisato Toyoda2
To evaluate the potential performance of mass resolution for the time-of-flight secondary ion mass spectrometry analyzer (TOF-SIMS) (TRIFT analyzer), we simulated the optical trajectory and the mass resolution using the ion trajectory simulation program ‘TRIO’. Under the condition of flight path of 2 meters and pulsed beam duration of 0.5 nano seconds, the calculated mass resolution reaches 17,000 at m/z 28, 41% higher than the current specification of mass resolution. Then, we designed the enhanced TRIFT analyzer by reproducing the simulation configuration as much as possible. The mass resolution of over 16,000 at 28Si+ was achieved as it was almost expected.