3C-O1-1030 PDF
帯電液滴ビームを用いるSIMSイメージングの展望
Various cluster ion beams have been studied with the aim of improving sensitivity in secondary ion mass spectrometry (SIMS). Development of a new ion beam is one of the most important issues for improving the performance of imaging in SIMS. Recently, large cluster ion sources such as gas clusters and charged droplets have been studied in order to improve the ionization efficiency. Electrospray droplet impact (EDI) method based on atmospheric pressure electrospray was developed as a new massive cluster beam source by Hiraoka et al. However, the beam diameter and beam density of the EDI gun need to be much improved for imaging applications. We have been developing a high-performance charged droplet beam gun using vacuum electrospray of aqueous solutions.