2P-23(2C-O1-1030) PDF
クラスターSIMS法を用いた高空間分解能イメージング質量分析に関する研究
Imaging Mass Spectrometry (IMS) is one of the promising tools for precise analysis of practical organic materials. Although Matrix-Assisted Laser Desorption/Ionization (MALDI) has been widely used for such purpose in the past decade, sub-um spatial resolution is still unreachable. Bi cluster SIMS has a capability for it because the fine-focused Bi cluster ion beam can be easily obtained and no sample preparation, such as matrix spraying, is required for SIMS2). In this study, the possibility of the imaging mass spectrometry with high spatial resolution by Bi cluster SIMS is investigated using model organic patterned-samples.
As a model sample, the homogeneous layer of 2-TNATA (4,4′,4′′-Tris[2-naphthyl(phenyl)amino]triphenylamine) was deposited on the surface of clean silicon wafer using vacuum evaporation. Then, patterned a-NPD (N,N’-Di(1-naphthyl)-N,N’-diphenylbenzidine) layer was deposited on it using metal mask. The thickness of each organic layer was about 100 nm. The spatial resolution calculated by the mass image of 2-TNATA was about 700 nm. It was confirmed that Bi cluster SIMS can easily provide the mass images with sub-um spatial resolution. In addition, the relationship between the sensitivity and the spatial resolution will be shown and discussed in the presentation.