3A-O2-1635 PDF
クラスターイオンを用いる二次イオン質量分析法の新展開
Massive Ar cluster beams are quite useful as primary beam for SIMS, given their reduced surface damage and fragmented ion generation. We have recently successful in obtaining a fine focused massive cluster ion beam with the diameter of about 1
μm in spite of the large ion energy distribution.
Recent progress and future trend in this technique will be discussed together with upcoming equipment and possible applications.