受賞講演
- 第2日 5月16日（水） 10:25～10:45 A会場（オービットホール）
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2A-AW-1025 PDF
二次イオン質量分析のための真空型エレクトロスプレー液滴イオン銃の開発
Recently, massive cluster ion beams such as argon gas cluster and charged droplet have been studied in order to improve the performance of secondary ion mass spectrometry (SIMS). Electrospray droplet impact (EDI) method based on atmospheric pressure electrospray was developed as a new massive cluster beam gun by Hiraoka and coworkers. However, the current and brightness of the EDI beams need to be much improved for practical use in surface analysis. To improve the performance of this method, we have developed a vacuum-type electrospray droplet ion (V-EDI) gun using an electrospray of aqueous solutions in vacuum as a beam source. The prototype of the V-EDI gun was installed in a time-of-flight SIMS analyzer to evaluate desorption ionization efficiencies produced by the V-EDI beams.