1P-39 PDF
Secondary ion yields produced by charged droplet and Ga ion beams
(1Univ. Yamanashi, 2Univ. Yamanashi) oRyo Watanabe1, Satoshi Ninomiya1, Yuji Sakai2, Lee Chuin Chen1, Kenzo Hiraoka2
This study provides the yields of secondary ions produced by Ga ion and charged droplet beams with a time-of-flight secondary ion mass spectrometer.