3A-O2-1635 PDF
Current Progress in SIMS using Massive Cluster ion beams
Massive Ar cluster beams are quite useful as primary beam for SIMS, given their reduced surface damage and fragmented ion generation. We have recently successful in obtaining a fine focused massive cluster ion beam with the diameter of about 1
μm in spite of the large ion energy distribution.
Recent progress and future trend in this technique will be discussed together with upcoming equipment and possible applications.