演題概要

ポスター発表

第２日　５月１５日（木）　　会場（月光）

2P-25　　PDF

投影型イメージング質量分析用時間検知型半導体検出器の開発

(¹阪大院工・ ²阪大院理・ ³KEK)
^o河井洋輔¹・ 松岡久典¹・ 間久直¹・ 青木順²・ 豊田岐聡²・ 藤田陽一³・ 池本由希子³・ 新井康夫³・ 粟津邦男¹

A time and position sensitive ion detector has been developed for a stigmatic imaging mass spectrometer. To realize a high spacial- and time-resolved detector which detects multiple ion signals with a short measurement time, we have applied a Silicon-On-Insulator (SOI) CMOS process which realizes fast response. By measuring ion flight time at each pixel independently, a multi hit detection can be achieved, which will make a stigmatic imaging mass spectrometer more useful analytical technique.